Infrared durable protective/antireflection coatings with high performance on Ge and Si substrates

XiLin Yao; ChangXin Xiong; ChangCheng Yang; NanChun Tong

doi:10.1117/12.674195

9 June 2006 Infrared durable protective/antireflection coatings with high performance on Ge and Si substrates

XiLin Yao, ChangXin Xiong, ChangCheng Yang, NanChun Tong

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 614908 (2006) https://doi.org/10.1117/12.674195
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

Firstly, a reverse synthesis method is outlined for the determination of the optical constants of infrared coatings from transmittance spectrum data by optimizing the physical thickness, refractive index and extinction coefficient, which can apply to all kinds of transmission spectra and do not rely on the existence of interference fringe patterns and the absorption of substrates. A lot of deposition experiments with the ion-assisted deposition (IAD) technique have firstly done about infrared optical materials ZnS, YF3, Ge and DLC (diamond-like-carbon), in order to obtain high dense and low absorbance layers in the 3-5μm and 8-12μm spectral windows. Using the reverse synthesis method, the refractive index and extinction coefficient of these materials have been obtained accurately. The appropriate deposition parameters and the problems from the deposition process are in detail discussed in this paper. YF3 has been then associated with ZnS and Ge layers so as to obtain antireflection coatings with high performance on Ge and Si substrates in 3-5μm and/or 8-12μm range. In addition, a novel multi-layer infrared AR coating utilizing DLC film as one of the low index films has also been developed for Si and Ge substrates. The optical performance is satisfied (average transmittance is no less than 97%, maximum transmittance is more than 98%, from 8μm to 11.5μm), which is better than that of a single film of one quarterwave DLC coating with interior surface multi-layer AR coated on Ge substrates. However, the adhesion between multi-layer AR coatings and DLC coating is not well, leading to coatings falling off from substrates after humidity test and moderate abrasion test, according to MIL-F-48497. Through a lot of experiments, a non-absorbing coating material has been found as bonding layer to solve this problem. The optical properties of three kinds of infrared coatings and the environmental and physical durability test results including high/low temperature test, abrasion test, salt solubility test, etc, are also in detail presented in this paper.

Citation Download Citation

XiLin Yao, ChangXin Xiong, ChangCheng Yang, and NanChun Tong "Infrared durable protective/antireflection coatings with high performance on Ge and Si substrates", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 614908 (9 June 2006); https://doi.org/10.1117/12.674195

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available