The effects of wafer-scan induced image blur on CD control, image slope, and process window in maskless lithography

Yijian Chen; Yashesh Shroff

doi:10.1117/12.655113

24 March 2006 The effects of wafer-scan induced image blur on CD control, image slope, and process window in maskless lithography

Yijian Chen, Yashesh Shroff

Author Affiliations +

Proceedings Volume 6151, Emerging Lithographic Technologies X; 61512D (2006) https://doi.org/10.1117/12.655113
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

In this paper we present analytical and simulation results on the wafer-scan induced image blur and its impact on CD control, image slope and line-edge roughness (LER), and process window in maskless lithography. It is shown that the effects of image blur do not impose serious constraints on lithographic performance in low throughput operation. However, when throughput is high, significant CD enlargement, lower image slope and higher LER, and process window degradation are observed consistently in both coherent imaging analysis and partially coherent lithographic simulations. The dependence of CDs on the wafer's scan speed and the distance between neighboring features will be an important issue of maskless OPC development. We also analyze the potential challenges of image blur to DUV and EUV maskless lithography and propose several solutions to overcome them.

Citation Download Citation

Yijian Chen and Yashesh Shroff "The effects of wafer-scan induced image blur on CD control, image slope, and process window in maskless lithography", Proc. SPIE 6151, Emerging Lithographic Technologies X, 61512D (24 March 2006); https://doi.org/10.1117/12.655113

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available