A simple replication method to fabricate polymer waveguide

Chia-Yu Lin; Ying-Hong Ling; Wei-Ching Chuang; Chi-Ting Ho; Wen-Chung Chang; Wei-Chih Wang

doi:10.1117/12.658940

15 March 2006 A simple replication method to fabricate polymer waveguide

Chia-Yu Lin, Ying-Hong Ling, Wei-Ching Chuang, Chi-Ting Ho, Wen-Chung Chang, Wei-Chih Wang

Proceedings Volume 6177, Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems V; 617710 (2006) https://doi.org/10.1117/12.658940
Event: Nondestructive Evaluation for Health Monitoring and Diagnostics, 2006, San Diego, CA, United States

Abstract

We have developed a soft lithography method to replicate polymer waveguides. In this method, the waveguides are produced by a two-step molding process where master mold is first formed on a negatively tone phototresist and subsequently transferred to a PDMS mold, and silicone rubber mold is then used as a stamp to transfer the final waveguide pattern onto a UV cure epoxy. Initial results show good pattern transferring in physical shape. The optical performance is measured based on the propagation loss. In our design, the measurement was measured at 0.26 dB/mm for 1.3μm and 0.24 dB/mm for 1.55μm.

Citation Download Citation

Chia-Yu Lin, Ying-Hong Ling, Wei-Ching Chuang, Chi-Ting Ho, Wen-Chung Chang, and Wei-Chih Wang "A simple replication method to fabricate polymer waveguide", Proc. SPIE 6177, Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems V, 617710 (15 March 2006); https://doi.org/10.1117/12.658940

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