A comparison of surface metrology techniques

Mike Conroy; Joe Armstrong

doi:10.1117/12.663390

27 April 2006 A comparison of surface metrology techniques

Mike Conroy, Joe Armstrong

Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 61880B (2006) https://doi.org/10.1117/12.663390
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

The study of nanometre surface metrology is becoming more and more commonplace in industrial and research environments. Because of this expansion there are more and more technologies available for looking at the surface and due to the differences in the techniques each has its own specialist applications. Stylus profilometry, white light interferometry and confocal microscopy are common techniques used to measure surface metrology to nanometre precision. Strengths and weaknesses of each of the techniques are discussed with examples.

Citation Download Citation

Mike Conroy and Joe Armstrong "A comparison of surface metrology techniques", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880B (27 April 2006); https://doi.org/10.1117/12.663390

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