Automated control of technological parameters of vacuum equipment to guarantee unbreakable quality check

A. N. Kozlov; D. Greenfield; A. V. Scherbakov; A. M. Filachev

doi:10.1117/12.693193

31 May 2006 Automated control of technological parameters of vacuum equipment to guarantee unbreakable quality check

A. N. Kozlov, D. Greenfield, A. V. Scherbakov, A. M. Filachev

Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 62780C (2006) https://doi.org/10.1117/12.693193
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation

Abstract

Discussed are the principles of building automatic control systems for electron- and ion-beam technological equipment. It is shown that such systems must provide unbreakable control of the technological processes, failure-safe evacuation and quality control.

Citation Download Citation

A. N. Kozlov, D. Greenfield, A. V. Scherbakov, and A. M. Filachev "Automated control of technological parameters of vacuum equipment to guarantee unbreakable quality check", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780C (31 May 2006); https://doi.org/10.1117/12.693193

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