H(infinity)-based active microvibration control of an ultra-precision machine tool

Liping Chen; Chunliang Zhang

doi:10.1117/12.716569

25 October 2006 H(infinity)-based active microvibration control of an ultraprecision machine tool

Liping Chen, Chunliang Zhang

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62801O (2006) https://doi.org/10.1117/12.716569
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

A 6-degree-of-freedom microvibration isolation system for an ultra-precision machine tool has been developed. This system uses four air springs as passive vibration isolation elements and eight giant magnetostrictive actuators as active vibration isolation elements. Four vertical actuators and air springs are set in parallel to make use of the giant magnetostrictive actuators effectively. The displacement and velocity of the ultra-precision machine tool are chosen as the output feedback variables for the controller. The H_(infinity) control approach is used to design the active vibration control system. Computer simulations and experiments are carried out to verify this system's microvibration control performance. The simulation and experimental results show that the developed active vibration control system has good isolation performance against the floor disturbance over wide frequency area.

Citation Download Citation

Liping Chen and Chunliang Zhang "H(infinity)-based active microvibration control of an ultraprecision machine tool", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62801O (25 October 2006); https://doi.org/10.1117/12.716569

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