Paper
6 November 2006 Spatial 3-D nonlinear calibration technique for PSD
Lifeng Guo, Guoxiong Zhang, Qi Zheng, Qiang Gong, Wenyao Liu
Author Affiliations +
Abstract
A 3-D nonlinear calibration technique for Position sensitive detector (PSD) in long distance laser collimating measurement is proposed. An automatic calibration system was developed to measure the nonlinearity of a 2-D PSD in 3-D space. It is mainly composed of a high accurate 2-D motorized translational stage, a high precision distance measuring device, and a computer-based data acquisition and control system. With the aid of the calibration system, the nonlinear characteristic of 2-D PSD is checked in a long collimating distance up to 78 meters. The calibration experiment was carried out for a series of distance, e.g. every 15 meters. The results showed that the nonlinearity of 2-D PSD is different evidently when the PSD element is at different distance from the laser head. One calculating method is defined to evaluate the nonlinear errors. The spatial 3-D mapping relationship between the actual displacements of the incident light and the coordinates of 2-D PSD outputs is established using a multilayer feedforward neural network.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lifeng Guo, Guoxiong Zhang, Qi Zheng, Qiang Gong, and Wenyao Liu "Spatial 3-D nonlinear calibration technique for PSD", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63574I (6 November 2006); https://doi.org/10.1117/12.717331
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KEYWORDS
Calibration

Distance measurement

Neural networks

Sensors

Electrodes

Signal processing

3D metrology

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