Electrical detection of biomolecules in a PDMS micro-fluidic channel using a MOSFET-type biosensor

Jang-Kyoo Shin; Dong-Sun Kim; Geunbae Lim; Shuichi Shoji

doi:10.1117/12.696050

14 December 2006 Electrical detection of biomolecules in a PDMS micro-fluidic channel using a MOSFET-type biosensor

Jang-Kyoo Shin, Dong-Sun Kim, Geunbae Lim, Shuichi Shoji

Proceedings Volume 6416, Biomedical Applications of Micro- and Nanoengineering III; 641612 (2006) https://doi.org/10.1117/12.696050
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2006, Adelaide, Australia

Abstract

In this article, we report a MOSFET-type biosensor assembled in a polydimethylsiloxane (PDMS) micro-fluidic channel for the electrical detection of nano-scale biomolecules. The MOSFET-type sensor was fabricated on the basis of standard complementary metal oxide semiconductor (CMOS) technology. Au which has a chemical affinity with thiol by forming a self-assembled monolayer (SAM) was used as the gate metal. In order to apply to the hybrid micro-flow-system for a prototype lab-on-a-chip, the PDMS layer with the micro-channel was aligned along with the sensing area of the MOSFET device. Thiol which was injected into the micro-fluidic channel was detected by measuring the electrical characteristics of the MOSFET sensor in both ex-situ and in-situ due to the negative charge of thiol.

Citation Download Citation

Jang-Kyoo Shin, Dong-Sun Kim, Geunbae Lim, and Shuichi Shoji "Electrical detection of biomolecules in a PDMS micro-fluidic channel using a MOSFET-type biosensor", Proc. SPIE 6416, Biomedical Applications of Micro- and Nanoengineering III, 641612 (14 December 2006); https://doi.org/10.1117/12.696050

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