Fabrication of a microfluidic system with integrated electrochemical pump and valves

Dong Eun Lee; Steven Soper; Wanjun Wang

doi:10.1117/12.713916

22 January 2007 Fabrication of a microfluidic system with integrated electrochemical pump and valves

Dong Eun Lee, Steven Soper, Wanjun Wang

Author Affiliations +

Proceedings Volume 6465, Microfluidics, BioMEMS, and Medical Microsystems V; 64650B (2007) https://doi.org/10.1117/12.713916
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

An integrated microfluidic system with a check valve and a micropump based on electrochemical actuation was designed and fabricated using UV-LIGA microfabrication technologies. The main components of the system include two electrochemical (ECM) actuators, a polydimethylsiloxane (PDMS) membrane, and multi levels of covers. The thickness of the membrane is 100 &mgr;m thick and the thickness of the PDMS structure is 1000 &mgr;m. Hydrogen gas bubbles were generated from Pt black electrodes with 1M of NaCl solution in the valve chamber. Experimental results proved that the system can be operated by controlling the electrical signals supplied to the ECM actuators.

Citation Download Citation

Dong Eun Lee, Steven Soper, and Wanjun Wang "Fabrication of a microfluidic system with integrated electrochemical pump and valves", Proc. SPIE 6465, Microfluidics, BioMEMS, and Medical Microsystems V, 64650B (22 January 2007); https://doi.org/10.1117/12.713916

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