MEMS reflective wavefront sensor

Jonathan R. Andrews; Scott W. Teare; Sergio R. Restaino; David Wick; Christopher C. Wilcox; Ty Martinez; Don M. Payne

doi:10.1117/12.702890

9 February 2007 MEMS reflective wavefront sensor

Jonathan R. Andrews, Scott W. Teare, Sergio R. Restaino, David Wick, Christopher C. Wilcox, Ty Martinez, Don M. Payne

Proceedings Volume 6467, MEMS Adaptive Optics; 64670A (2007) https://doi.org/10.1117/12.702890
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Sandia National Laboratory has constructed several segmented MEMS deformable mirrors that are under investigation for their suitability in Adaptive Optics systems for the Naval Research Laboratory. These mirrors are constructed in a hexagonal array and have been constructed with flat surfaces, or with optical power allowing each mirror to bring its subaperture of light to a focus similar to a Shack- Hartman array. Each mirror can use the tip, tilt and piston function to move the focused spots to the desired reference location, and the measurement of the applied voltage can be used directly to power a similar flat MEMS deformable mirror. This paper reports on the suitability of this reflective wavefront sensor for closed-loop Adaptive Optics applications.

Citation Download Citation

Jonathan R. Andrews, Scott W. Teare, Sergio R. Restaino, David Wick, Christopher C. Wilcox, Ty Martinez, and Don M. Payne "MEMS reflective wavefront sensor", Proc. SPIE 6467, MEMS Adaptive Optics, 64670A (9 February 2007); https://doi.org/10.1117/12.702890

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available