Actinic inspection of sub-50 nm EUV mask blank defects

Jingquan Lin; Nils Weber; Jochen Maul; Stefan Hendel; Karsten Rott; Michael Merkel; Gerd Schoenhense; Ulf Kleineberg

doi:10.1117/12.736920

3 May 2007 Actinic inspection of sub-50 nm EUV mask blank defects

Jingquan Lin, Nils Weber, Jochen Maul, Stefan Hendel, Karsten Rott, Michael Merkel, Gerd Schoenhense, Ulf Kleineberg

Proceedings Volume 6533, 23rd European Mask and Lithography Conference; 65331R (2007) https://doi.org/10.1117/12.736920
Event: European Mask and Lithography Conference2007, 2007, Grenoble, France

Abstract

A new actinic mask inspection technology to probe nano-scaled defects buried underneath a Mo/Si multilayer reflection coating of an Extreme Ultraviolet Lithography mask blank has been implemented using EUV Photoemission Electron Microscopy (EUV-PEEM). EUV PEEM images of programmed defect structures of various lateral and vertical sizes recorded at around 13 nm wavelength show that 35 nm wide and 4 nm high buried line defects are clearly detectable. The imaging technique proves to be sensitive to small phase jumps enhancing the visibility of the edges of the phase defects which is explained in terms of a standing wave enhanced image contrast at resonant EUV illumination.

Citation Download Citation

Jingquan Lin, Nils Weber, Jochen Maul, Stefan Hendel, Karsten Rott, Michael Merkel, Gerd Schoenhense, and Ulf Kleineberg "Actinic inspection of sub-50 nm EUV mask blank defects", Proc. SPIE 6533, 23rd European Mask and Lithography Conference, 65331R (3 May 2007); https://doi.org/10.1117/12.736920

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available