Modelling and simulation of a micromachined angular rate sensor with optimised mechanical suspension

A. Kulygin; M. Gergen; U. Schmid; H. Seidel

doi:10.1117/12.721680

15 May 2007 Modelling and simulation of a micromachined angular rate sensor with optimised mechanical suspension

A. Kulygin, M. Gergen, U. Schmid, H. Seidel

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65891O (2007) https://doi.org/10.1117/12.721680
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

The focus of this paper is on the optimization of a novel angular rate sensor element based on the Coriolis force working principle. The device is resonantly excited and consists of two coupled, mechanical oscillators representing the drive and the sense unit. To minimize energy loss during operation, the device is connected at one single point to the substrate. This kind of suspension is especially advantageous when choosing an antiphase torsional motion between the drive and sense unit. Furthermore, temperature effects on the device characteristics are reduced. The drive unit is typically excited in the frequency range of 10 to 15 kHz using electrostatic forces. To achieve optimized signal levels the geometry of the sensor is completely parameterized. An analytical model is set up via the so-called deformation algorithm applying the Ritz method. Next, the eigenfrequencies and mode shapes of the sensor were calculated. After including the effects of the Coriolis force, the corresponding change in capacity of the sense unit is determined. An advanced hill climbing algorithm is used varying two geometrical parameters simultaneously. This pair of parameters is changed in such a way that the difference in drive and sense frequencies is fixed to 200 Hz. Based on this procedure an optimized design could be found with an increase in signal levels of about 450% concerning an earlier version (e.g. from 3 to 17 aF°/s). In addition, FEM (Finite Element Method) simulations are performed to check the analytically calculated eigenfrequencies and mode shapes. Both approaches show comparable results.

Citation Download Citation

A. Kulygin, M. Gergen, U. Schmid, and H. Seidel "Modelling and simulation of a micromachined angular rate sensor with optimised mechanical suspension", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65891O (15 May 2007); https://doi.org/10.1117/12.721680

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