Phase Shifting Interferometry Using Polarization Component Phase Shifters

J. Giroux; M. P. Kothiyal; C. Delisle

doi:10.1117/12.938601

25 November 1986 Phase Shifting Interferometry Using Polarization Component Phase Shifters

J. Giroux, M. P. Kothiyal, C. Delisle

Proceedings Volume 0661, Optical Testing and Metrology; (1986) https://doi.org/10.1117/12.938601
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

The use of polarization components as phase shifters in phase shifting interferometry has been investigated. Results of an error analysis carried out to determine the influence of the errors of the polarization components on the measured value of phase are presented. Cyclic shear interferometer with polarization phase shifting is used for phase shifting interferometry.

Citation Download Citation

J. Giroux, M. P. Kothiyal, and C. Delisle "Phase Shifting Interferometry Using Polarization Component Phase Shifters", Proc. SPIE 0661, Optical Testing and Metrology, (25 November 1986); https://doi.org/10.1117/12.938601

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