Fabrication and metrology of micro- and nano-optics

Faramarz Farahi

doi:10.1117/12.738350

2 July 2007 Fabrication and metrology of micro- and nano-optics

Faramarz Farahi

Proceedings Volume 6619, Third European Workshop on Optical Fibre Sensors; 66190E (2007) https://doi.org/10.1117/12.738350
Event: Third European Workshop on Optical Fibre Sensors, 2007, Napoli, Italy

Abstract

Large scale manufacturing of nano and micro-optics, both free-space and planar waveguide optics, has many technical challenges. Supporting technologies required for manufacturing of different types of optical devices and modules in nano and micro scales are being developed. As fabrication technology to support nano and micro optics improves, challenges associated with metrology of optical feature in nano and micro scales become more apparent. In this paper some examples of research projects at the University of North Carolina at Charlotte in these areas are presented.

Citation Download Citation

Faramarz Farahi "Fabrication and metrology of micro- and nano-optics", Proc. SPIE 6619, Third European Workshop on Optical Fibre Sensors, 66190E (2 July 2007); https://doi.org/10.1117/12.738350

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