Interferometer alignment

Sen Han

doi:10.1117/12.731134

21 September 2007 Interferometer alignment

Sen Han

Proceedings Volume 6676, Optical System Alignment and Tolerancing; 66760B (2007) https://doi.org/10.1117/12.731134
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

For all of the interferometers, alignment has played a key role in manufacturing them. Alignment goals are reproducible results across systems, easy to use and understand, altering overall mechanical design as little as possible, using the loosest tolerances required to achieve results. This paper describes four typical interferometers and their alignments. They are 1.06um interferometer, 24" large aperture phase shifting interferometer, Ritchey-Common testing and microscope interferometer as well.

Citation Download Citation

Sen Han "Interferometer alignment", Proc. SPIE 6676, Optical System Alignment and Tolerancing, 66760B (21 September 2007); https://doi.org/10.1117/12.731134

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