Paper
17 January 2008 Vectorial shearing interferometer with a high resolution phase shifter
Author Affiliations +
Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 672330 (2008) https://doi.org/10.1117/12.783378
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
Vectorial shearing interferometer has been used to measure small and large non-rotationally symmetrical wavefronts aberrations. This interferometric system encompasses large and differential wavefront displacements using a high accuracy rotation system incorporated in a Mach-Zehnder interferometer. The rotation system is based on the Risley prism arrangement and it is controlled with an electronic servomotor system by means of an auto-tuning algorithm. We present the servo-mechanical system, electronic interface and algorithms to control the performance of the high resolution rotation device that is used to control the wavefront phase shifting.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. García-Torales and J. L. Flores "Vectorial shearing interferometer with a high resolution phase shifter", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 672330 (17 January 2008); https://doi.org/10.1117/12.783378
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KEYWORDS
Prisms

Servomechanisms

Wavefronts

Control systems

Shearing interferometers

Signal processing

Interferometry

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