A selective control of narrow groove parameters with scanning differential heterodyne microscope

D. V. Baranov; E. M. Zolotov

doi:10.1117/12.752346

31 July 2007 A selective control of narrow groove parameters with scanning differential heterodyne microscope

D. V. Baranov, E. M. Zolotov

Proceedings Volume 6728, ICONO 2007: Novel Photonics Materials; Optics and Optical Diagnostics of Nanostructures; 67281L (2007) https://doi.org/10.1117/12.752346
Event: The International Conference on Coherent and Nonlinear Optics, 2007, Minsk, Belarus

Abstract

The general idea of the present investigations is to use both TE and TM polarization of electromagnetic wave in high resolution scanning differential heterodyne microscope to get information about width and depth of deep and narrow metalized rectangular grooves. The main application of the method is the characterization of plasmon polariton waveguides. Using rigorous diffraction theory we have demonstrated the difference in periodic depth dependences of phase and amplitude contrast of microscope response for TE and TM polarization of probing beams. We have also proposed a method of depth and width control for grooves in case of a phase inversion of response.

Citation Download Citation

D. V. Baranov and E. M. Zolotov "A selective control of narrow groove parameters with scanning differential heterodyne microscope", Proc. SPIE 6728, ICONO 2007: Novel Photonics Materials; Optics and Optical Diagnostics of Nanostructures, 67281L (31 July 2007); https://doi.org/10.1117/12.752346

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