In-Process Metrology For X-Ray Optics

Albert F Slomba; Lucian A Montagnino

doi:10.1117/12.939520

13 February 1987 In-Process Metrology For X-Ray Optics

Albert F Slomba, Lucian A Montagnino

Proceedings Volume 0676, Ultraprecision Machining and Automated Fabrication of Optics; (1987) https://doi.org/10.1117/12.939520
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Space-based astronomy at x-ray wavelengths has steadily progressed over the past 25 years. These advances have been made possible through the use of telescopes with increasingly higher resolution and collecting area, along with corresponding improvements in detectors, focal plane instrumentation, and pointing systems. In this paper, we discuss an in-process metrology system designed to provide sufficiently accurate data to the polishing process to allow fabrication of a half-arc second glancing angle of incidence telescope operating in the 1 to 7 KeV spectral region. This measurement system was developed in anticipation of, and applied to, the Advanced X-ray Astrophysics Facility (AXAF) Technology Mirror Assembly(TMA). The metrology instruments represent a considerable advance in the state of the art for measurements of large, thin, aspheric cylindrical optical elements. They allowed measurement of surface figure errors over a very wide range of spatial surface frequency with unprecedented accuracy during each phase of fabrication -- from coarse grinding through figuring and final polishing.

Citation Download Citation

Albert F Slomba and Lucian A Montagnino "In-Process Metrology For X-Ray Optics", Proc. SPIE 0676, Ultraprecision Machining and Automated Fabrication of Optics, (13 February 1987); https://doi.org/10.1117/12.939520

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