Use Of The WYKO And Sommargren Profilers In Polishing Research

Norman J Brown

doi:10.1117/12.939604

23 March 1987 Use Of The WYKO And Sommargren Profilers In Polishing Research

Norman J Brown

Proceedings Volume 0680, Surface Characterization and Testing; (1987) https://doi.org/10.1117/12.939604
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

This paper compares the WYKO and Sommargren noncontact surface profilers, describes their utility and limitations, their accuracy and their use in polishing research. Surface readings below lA rms by these instruments are reported.

Citation Download Citation

Norman J Brown "Use Of The WYKO And Sommargren Profilers In Polishing Research", Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); https://doi.org/10.1117/12.939604

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