Paper
4 January 2008 Manufacturing and testing of the line-array fiber optic image slicer based on silicon V-grooves
Jingqiu Liang, Peng Guo, Zhongzhu Liang, Yanqing Zhu, Fengjie Hou, Jinsong Yao
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Abstract
Linear fiber-optic image slicer is used more and more in spatial exploration and imaging system. In this paper, a plane arranging method of fiber-optic array based on Si-V grooves is established in order to improve the accuracy and reduce the cost of manufacturing. Firstly, the Si-V groove array is micro-machined with anisotropic etching process, then optical fibers are placed in the grooves orderly with plane arranging method. Secondly, the end surfaces of the device are polished, also the linear fiber-optic image slicer is packaged. Finally, some parameters are tested, including structure parameters, transmittivity and vibration test. Experimental results indicate that the maximum error accumulated in 2000 periods of the Si-V grooves is 0.5μm, the error of the height in Si-V grooves is less than 0.15μm, the roughness of the end surface is less than 0.9nm. The transmittivity of the linear fiber-optic image slicer that without optical film is 51.46% at the wavelength of 632.8nm. After random vibration experiment, the ratio of the broken fiber increased by 0.1%. While the temperature reached 320°C, the stress of epoxy will be 130Mpa, which is close to the limit resistance stress of 139Mpa, some cracks appeared.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jingqiu Liang, Peng Guo, Zhongzhu Liang, Yanqing Zhu, Fengjie Hou, and Jinsong Yao "Manufacturing and testing of the line-array fiber optic image slicer based on silicon V-grooves", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683607 (4 January 2008); https://doi.org/10.1117/12.757832
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KEYWORDS
Fiber optics

Fiber optics tests

Silicon

Image transmission

Image processing

Optics manufacturing

Optical fibers

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