A new model for vacuum quality and lifetime prediction in hermetic vacuum bonded MEMS

A. Bonucci; S. Guadagnuolo; A. Caterino; A. Conte; M. Moraja

doi:10.1117/12.761140

14 February 2008 A new model for vacuum quality and lifetime prediction in hermetic vacuum bonded MEMS

A. Bonucci, S. Guadagnuolo, A. Caterino, A. Conte, M. Moraja

Proceedings Volume 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII; 68840M (2008) https://doi.org/10.1117/12.761140
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

In many MEMS applications the level of vacuum is a key issue as it directly affects the quality of the device, in terms of response reliability. Due to the unavoidable desorption phenomena of gaseous species from the internal surfaces, the vacuum inside a MEMS, after bonding encapsulation, tends to be degraded, unless a proper getter solution is applied. The in situ getter film (PaGeWafer®) is recognised to be the most reliable way to get rid of degassed species, assuring uniform, high quality performances of the device throughout the lifetime. Moreover, post process vacuum quality control and reliability for hermetic bonding is extremely important for overall device reliability and process yield. In this paper we will discuss the main factors that are critical in the attainment of vacuum and will present a novel calculation model that enables the prediction of vacuum level after bonding, making also possible the estimate of the lifetime. Furthermore, a new analytical method based on the residual gas analyses (RGA) will be presented that gives the main characteristics of the materials. Modeling and simulation work support the process optimization and system design.

Citation Download Citation

A. Bonucci, S. Guadagnuolo, A. Caterino, A. Conte, and M. Moraja "A new model for vacuum quality and lifetime prediction in hermetic vacuum bonded MEMS", Proc. SPIE 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII, 68840M (14 February 2008); https://doi.org/10.1117/12.761140

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available