Mobile flat mirrors for micro-optical scanners

G. Molar-Velázquez; F. J. Renero-Carrillo; W. Calleja-Arriaga

doi:10.1117/12.763512

8 February 2008 Mobile flat mirrors for micro-optical scanners

G. Molar-Velázquez, F. J. Renero-Carrillo, W. Calleja-Arriaga

Proceedings Volume 6887, MOEMS and Miniaturized Systems VII; 68870K (2008) https://doi.org/10.1117/12.763512
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

A mobile (electrostatic) flat mirror is designed to bend visible light, and can be fabricated on crystalline silicon by means of photolithography and humid etching. Using the CoventorWare^TM software we carry out a simulation of the fabrication process as well as the movement versus voltage of the mobile (electrostatic) flat mirror, which dimensions are 50 microns large by 40 microns width. The required voltage to move the flat mirror 2.17° is 38.1 V. The flatness of the micro-mirror is enough to bend the light in the visible range.

Citation Download Citation

G. Molar-Velázquez, F. J. Renero-Carrillo, and W. Calleja-Arriaga "Mobile flat mirrors for micro-optical scanners", Proc. SPIE 6887, MOEMS and Miniaturized Systems VII, 68870K (8 February 2008); https://doi.org/10.1117/12.763512

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