Gas phase study of the reactivity of optical coating materials with hydrocarbons using a desk-top size EUV laser

S. Heinbuch; F. Dong; J. J. Rocca; E. R. Bernstein

doi:10.1117/12.791935

3 April 2008 Gas phase study of the reactivity of optical coating materials with hydrocarbons using a desk-top size EUV laser

S. Heinbuch, F. Dong, J. J. Rocca, E. R. Bernstein

Author Affiliations +

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69213F (2008) https://doi.org/10.1117/12.791935
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

The reactivity of prospective capping layer extreme ultraviolet (EUV) mirror materials with hydrocarbons, alcohols, and water is studied in the gas phase using mass spectroscopy of metal-oxide clusters. We report the results of chemistry studies for Si, Ti, Hf, Zr, and Ru metal oxide nanoclusters in which the reaction products were ionized with little or no fragmentation by 26.5 eV photons from a desk-top size 46.9 nm Ne-like Ar laser. Hf and Zr oxides are found to be much less reactive than Si or Ti oxides in the presence EUV light. Ru oxides show different chemistry and are inactive with water/alcohols, and active with saturated/unsaturated hydrocarbons. The results are relevant to the design of EUV mirror capping layers that are resistant to carbon contamination.

Citation Download Citation

S. Heinbuch, F. Dong, J. J. Rocca, and E. R. Bernstein "Gas phase study of the reactivity of optical coating materials with hydrocarbons using a desk-top size EUV laser", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69213F (3 April 2008); https://doi.org/10.1117/12.791935

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available