Innovative power supply concepts for DBD excilamps

Hubert Piquet; Sounil Bhosle; Rafael Díez; Areski Toumi; Georges Zissis

doi:10.1117/12.785662

9 January 2008 Innovative power supply concepts for DBD excilamps

Hubert Piquet, Sounil Bhosle, Rafael Díez, Areski Toumi, Georges Zissis

Proceedings Volume 6938, Atomic and Molecular Pulsed Lasers VII; 693810 (2008) https://doi.org/10.1117/12.785662
Event: Atomic and Molecular Pulsed Lasers VII, 2007, Tomsk, Russian Federation

Abstract

Excimer and exciplex UV/VUV sources excited by Dielectric Barrier Discharges represent a promising technology for industrial applications where powerful and efficient UV sources are needed. According to previous work, the most suited power supply waveform for coaxial DBD Excilamps is a unipolar pulsed voltage excitation of some kilovolts at some hundred of kilohertz with a duty cycle around one percent. We present here new concepts for energy supplying of coaxial DBDs, based on the direct control of the current in the lamps. These concepts have been tested by means of simulation models developed in our department and the time evolution of the UV radiation is presented for various considered current waveforms. Based on these results, a power supply topology has been designed for an efficient power transfer to the Excilamp. It is based on a converter which controls the current flowing through the DBD. The results concerning the coupling of this converter with a DBD load are commented.

Citation Download Citation

Hubert Piquet, Sounil Bhosle, Rafael Díez, Areski Toumi, and Georges Zissis "Innovative power supply concepts for DBD excilamps", Proc. SPIE 6938, Atomic and Molecular Pulsed Lasers VII, 693810 (9 January 2008); https://doi.org/10.1117/12.785662

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