Research on the realization of high precision RC array through IC thin film technology

Fangkui Sun; Wei Jiang; Di Wu; Shoutao Zhang

doi:10.1117/12.792197

11 March 2008 Research on the realization of high precision RC array through IC thin film technology

Fangkui Sun, Wei Jiang, Di Wu, Shoutao Zhang

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69843I (2008) https://doi.org/10.1117/12.792197
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

This paper discusses some advantages of IC thin film technology in realizing RC array that traditional thick film technology does not have, which make IC thin film technology the mainstream in realizing RC array devices. Then it focuses on how to use IC thin film technology to realize high precision RC array, some practical techniques are put forward, based on our experiments and experience in layout design and fabrication. These techniques are demonstrated separately according to the respective characteristics of resistor and capacitor. Finally, the different ranges of precision of the devices tested in different ways through specific experiments are given.

Citation Download Citation

Fangkui Sun, Wei Jiang, Di Wu, and Shoutao Zhang "Research on the realization of high precision RC array through IC thin film technology", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843I (11 March 2008); https://doi.org/10.1117/12.792197

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