Impurity-free vacancy disordering of quantum heterostructures with SiOxNy encapsulants deposited by magnetron sputtering

I. R. McKerracher; L. Fu; H. H. Tan; C. Jagadish

doi:10.1117/12.793568

9 September 2008 Impurity-free vacancy disordering of quantum heterostructures with SiOxNy encapsulants deposited by magnetron sputtering

I. R. McKerracher, L. Fu, H. H. Tan, C. Jagadish

Author Affiliations +

Proceedings Volume 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V; 70390U (2008) https://doi.org/10.1117/12.793568
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

Post-growth techniques such as impurity-free vacancy disordering (IFVD) are simple and effective avenues to monolithic integration of optoelectonic components. Sputter deposition of encapsulant films can enhance quantum well intermixing through IFVD and an additional mechanism involving surface damage during the sputtering process. In this study, these two mechanisms were compared in a multi-quantum well structure. The compositions of different silicon oxy-nitride films were controlled by sputter deposition in different ambient gases. These different encapsulants were used to initiate IFVD in the same heterostructure and the observed intermixing is compared to the film properties.

Citation Download Citation

I. R. McKerracher, L. Fu, H. H. Tan, and C. Jagadish "Impurity-free vacancy disordering of quantum heterostructures with SiOxNy encapsulants deposited by magnetron sputtering", Proc. SPIE 7039, Nanoengineering: Fabrication, Properties, Optics, and Devices V, 70390U (9 September 2008); https://doi.org/10.1117/12.793568

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available