Experimental approaches to x-ray phase-retrieval for nano-resolution diffraction imaging

Andrei Y. Nikulin

doi:10.1117/12.795951

5 September 2008 Experimental approaches to x-ray phase-retrieval for nano-resolution diffraction imaging

Andrei Y. Nikulin

Proceedings Volume 7076, Image Reconstruction from Incomplete Data V; 70760C (2008) https://doi.org/10.1117/12.795951
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

X-ray phase-retrieval algorithms are widely exploited in contemporary diffraction techniques to image at the nanoscale. Often reconstruction of the sample shape (image) suffices for the purpose of experiment. Identification of specimen composition requires a quantitative profiling of the complex refractive index. We show that the diffraction effects from the experimental setup and artifacts from the phase-retrieval algorithms themselves are comparable with the diffraction contrast that is experimentally observable from thin specimens with very low electron density. We show that, based on the analysis of application of the relevant phase-retrieval methods, there is a lower limit in optical density, which can be reconstructed using the existing phase-retrieval methods. This limit appears to be imposed by real-life experimental conditions and the intrinsic artifacts of the phase-retrieval techniques.

Citation Download Citation

Andrei Y. Nikulin "Experimental approaches to x-ray phase-retrieval for nano-resolution diffraction imaging", Proc. SPIE 7076, Image Reconstruction from Incomplete Data V, 70760C (5 September 2008); https://doi.org/10.1117/12.795951

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