Development of a goniometric light scatter instrument with sample imaging ability

Myriam Zerrad; Michel Lequime; Carole Deumié; Claude Amra

doi:10.1117/12.797621

25 September 2008 Development of a goniometric light scatter instrument with sample imaging ability

Myriam Zerrad, Michel Lequime, Carole Deumié, Claude Amra

Proceedings Volume 7102, Optical Fabrication, Testing, and Metrology III; 710207 (2008) https://doi.org/10.1117/12.797621
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

The principle of a new scattering measurement system including a mobile lighting and a fixed CCD array is described. This new system allows a spatially resolved light scattering characterization. Moreover it is possible to separate localized defects contribution from the local roughness measurement. The comprehensive characterization of optical coatings can be performed with this set-up, and some examples will be given.

Citation Download Citation

Myriam Zerrad, Michel Lequime, Carole Deumié, and Claude Amra "Development of a goniometric light scatter instrument with sample imaging ability", Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710207 (25 September 2008); https://doi.org/10.1117/12.797621

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