Experience using a double pass Shack-Hartmann set-up on a DUV high NA high performance lens

Markus Augustin; Stefan Müller-Pfeiffer; Lienhard Körner; Oliver Falkenstörfer

doi:10.1117/12.797726

25 September 2008 Experience using a double pass Shack-Hartmann set-up on a DUV high NA high performance lens

Markus Augustin, Stefan Müller-Pfeiffer, Lienhard Körner, Oliver Falkenstörfer

Proceedings Volume 7102, Optical Fabrication, Testing, and Metrology III; 71020P (2008) https://doi.org/10.1117/12.797726
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

Shack-Hartmann wave front sensors (SHS) are an accurate and highly versatile tool for characterizing and adjusting high performance optical systems, especially in the DUV wavelength range. The conventional set-up uses a single path approach. An illuminated pinhole is placed in the object plane and the sensor in the exit pupil of the system under test. This approach is applicable up to a NA of about 0.9 because of the limited ability of a pinhole to illuminate high numerical apertures. Beyond the limit a double pass set-up is necessary. The double pass approach also allows a higher precision and the application of multi-position tests well-known from interferometry. A set-up will be shown which can be easily integrated into existing Shack-Hartmann test benches. Some exemplary data will be given comparing results from single pass and double pass measurements.

Citation Download Citation

Markus Augustin, Stefan Müller-Pfeiffer, Lienhard Körner, and Oliver Falkenstörfer "Experience using a double pass Shack-Hartmann set-up on a DUV high NA high performance lens", Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 71020P (25 September 2008); https://doi.org/10.1117/12.797726

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