Dynamic analysis of piezoelectric-solid-liquid coupled system of micro nebulizer

Ming-wei Yang; Zhao-ying Zhou

doi:10.1117/12.805822

2 February 2009 Dynamic analysis of piezoelectric-solid-liquid coupled system of micro nebulizer

Ming-wei Yang, Zhao-ying Zhou

Proceedings Volume 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications; 71590H (2009) https://doi.org/10.1117/12.805822
Event: International Conference of Optical Instrument and Technology, 2008, Beijing, China

Abstract

Piezoelectric micro nebulizer is a typical piezoelectric-solid-liquid coupling problem. A 2D FEM model was presented for this system. Numerical results show that when the piezoelectric actuator is vibrated, nozzle film also is generated vibration, and the phase relationship occurs to them, and the operation at the second resonance frequency is more desirable than others. A good agreement between experimental results and theoretical results confirmed the validity of the theoretical model we developed. Therefore, the design of micro nebulizer to consider only the amplitude of piezoelectric vibration is not comprehensive, we must also consider the nozzle film vibration, as well as the phase between the back film and the nozzle film, and this can provide guidance for the optimal design of micro nebulizer.

Citation Download Citation

Ming-wei Yang and Zhao-ying Zhou "Dynamic analysis of piezoelectric-solid-liquid coupled system of micro nebulizer", Proc. SPIE 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 71590H (2 February 2009); https://doi.org/10.1117/12.805822

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