Far-infrared Fizeau interferometer for a large aspheric mirror

Yongqian Wu; Yudong Zhang

doi:10.1117/12.831459

5 May 2009 Far-infrared Fizeau interferometer for a large aspheric mirror

Yongqian Wu, Yudong Zhang

Proceedings Volume 7281, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes; 72810X (2009) https://doi.org/10.1117/12.831459
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

The design and system performance of a far-infrared interferometer with which to test rough aspheric surfaces are presented. It is based on the optical configuration of classical Fizeau interferometer. A CO2 laser is used as a light source operating at a 10.6μm wavelength. A He-Ne laser is introduced into the interferometer to solve problems concerning with alignment. The measuring error(RMS) of the interferometer is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.

Citation Download Citation

Yongqian Wu and Yudong Zhang "Far-infrared Fizeau interferometer for a large aspheric mirror", Proc. SPIE 7281, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 72810X (5 May 2009); https://doi.org/10.1117/12.831459

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