Front Matter: Volume 7362

17 June 2009 Front Matter: Volume 7362

Proceedings Volume 7362, Smart Sensors, Actuators, and MEMS IV; 736201 (2009) https://doi.org/10.1117/12.834806
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

This PDF file contains the front matter associated with SPIE Proceedings Volume 7362, including the Title Page, Copyright information, Table of COntents, Introduction (if any), and the Conference Committee listing.

Citation Download Citation

"Front Matter: Volume 7362", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736201 (17 June 2009); https://doi.org/10.1117/12.834806

Access the abstract

PROCEEDINGS
16 PAGES

CITATIONS

Cited by 2 scholarly publications.

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Microelectromechanical systems

Silver

Sensors

Thin films

Reliability

Actuators

Polymers

Keywords/Phrases