Russian standards for dimensional measurements for nanotechnologies

V. P. Gavrilenko; M. N. Filippov; Yu. A. Novikov; A. V. Rakov; P. A. Todua

doi:10.1117/12.821760

22 May 2009 Russian standards for dimensional measurements for nanotechnologies

V. P. Gavrilenko, M. N. Filippov, Yu. A. Novikov, A. V. Rakov, P. A. Todua

Proceedings Volume 7378, Scanning Microscopy 2009; 737812 (2009) https://doi.org/10.1117/12.821760
Event: SPIE Scanning Microscopy, 2009, Monterey, California, United States

Abstract

In order to provide the uniformity of measurements at the nanoscale, seven national standards have been developed in the Russian Federation. Of these seven standards, three standards specify the procedures of fabrication and certification of linear measures with the linewidth lying in the nanometer range. The other four standards specify the procedures of verification and calibration of customer's atomic force microscopes and scanning electron microscopes, intended to perform measurements of linear dimensions of relief nanostructures. For an atomic force microscope, the following four parameters can be deduced: scale factor for the video signal, effective radius of the cantilever tip, scale factor for the vertical axis of the microscope, relative deflection of the microscope's Z-scanner from the orthogonality to the plane of a sample surface. For a scanning electron microscope, the following two parameters can be deduced: scale factor for the video signal and the effective diameter of the electron beam. The standards came into force in 2008.

Citation Download Citation

V. P. Gavrilenko, M. N. Filippov, Yu. A. Novikov, A. V. Rakov, and P. A. Todua "Russian standards for dimensional measurements for nanotechnologies", Proc. SPIE 7378, Scanning Microscopy 2009, 737812 (22 May 2009); https://doi.org/10.1117/12.821760

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