All-interferometric six-degrees-of-freedom sensor based on laser self-mixing

Simona Ottonelli; Francesco De Lucia; Maurizio Dabbicco; Gaetano Scamarcio

doi:10.1117/12.827345

17 June 2009 All-interferometric six-degrees-of-freedom sensor based on laser self-mixing

Simona Ottonelli, Francesco De Lucia, Maurizio Dabbicco, Gaetano Scamarcio

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73891L (2009) https://doi.org/10.1117/12.827345
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

We report on the development of an all-interferometric sensor based on the laser-self-mixing for the simultaneous detection of multi-degrees-of-freedom displacement of a remote target. The prototype system consists only of a laser head, equipped with 6 diode lasers and a properly designed reflective target. Information on a single degree-of-freedom motion is extracted by the differential measurement of two linear displacements by means of two nominally identical self-mixing interferometers. The sensor has been experimentally tested to measure yaw, pitch, roll, straightness and flatness corrections over a continuous linear range of 1 m, with resolutions of 0.7 μm (longitudinal), 20 μm (straightness and flatness), 0.001° (yaw and pitch) and 0.015 °(roll).

Citation Download Citation

Simona Ottonelli, Francesco De Lucia, Maurizio Dabbicco, and Gaetano Scamarcio "All-interferometric six-degrees-of-freedom sensor based on laser self-mixing", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73891L (17 June 2009); https://doi.org/10.1117/12.827345

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