Makyoh topography studies of the morphology of periodic and quasi-periodic surfaces

Ferenc Riesz

doi:10.1117/12.827337

17 June 2009 Makyoh topography studies of the morphology of periodic and quasi-periodic surfaces

Ferenc Riesz

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73892M (2009) https://doi.org/10.1117/12.827337
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

Makyoh topography is an optical tool for the flatness testing of specular surfaces, based on the defocused detection of a collimated light beam reflected from the tested surface. The reflection image is related somehow to the surface relief pattern of the surface due to the focusing/defocusing action of the surface irregularities. The main application of the method is the assessment of the polishing quality of wafers in semiconductor technology. In this contribution, the imaging properties of periodic and quasiperiodic surfaces is analysed through analytic calculations and ray-tracing simulations for surfaces of various spectral properties. General imaging properties are established. Practical implications in the semiquantitative inspection of surface morphology/texture are pointed out, and experimental results are shown to illustrate the main points of the presented analysis.

Citation Download Citation

Ferenc Riesz "Makyoh topography studies of the morphology of periodic and quasi-periodic surfaces", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892M (17 June 2009); https://doi.org/10.1117/12.827337

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