Optically actuated micromanipulation of silicon nanomembranes

Stefan M. Oehrlein; RB Jacobson; Frank S. Flack; Max G. Lagally; Ryan J. Kershner

doi:10.1117/12.826424

28 August 2009 Optically actuated micromanipulation of silicon nanomembranes

Stefan M. Oehrlein, RB Jacobson, Frank S. Flack, Max G. Lagally, Ryan J. Kershner

Proceedings Volume 7400, Optical Trapping and Optical Micromanipulation VI; 74000X (2009) https://doi.org/10.1117/12.826424
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

We present progress in manipulating silicon nanomembranes using holographic optical tweezers. The holographic optical tweezers technique provides a non-contact means of directly controlling the nanomembranes. Silicon nanomembranes are macroscopic free-standing sheets of single-crystal silicon which can be as thin as 10 nm or less. The thinness of the membranes imparts unique electronic, optical and mechanical properties. This characteristic, combined with the ability to precisely engineer their dimensions, makes silicon nanomembranes ideal candidates for use in new electronic and photonic devices. The nanomembranes utilized for this work have controlled thicknesses of 220 nm and areas reaching up to 200x200 microns. Novel all optically actuated methods for directing membranes in microfluidic flow environments, controllable membrane flexing and as well as vertical reorientation and positioning are outlined.

Citation Download Citation

Stefan M. Oehrlein, RB Jacobson, Frank S. Flack, Max G. Lagally, and Ryan J. Kershner "Optically actuated micromanipulation of silicon nanomembranes", Proc. SPIE 7400, Optical Trapping and Optical Micromanipulation VI, 74000X (28 August 2009); https://doi.org/10.1117/12.826424

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