Plasma parameters and active particles kinetics in HBr dc glow discharges

A. Smirnov; A. Efremov; V. Svettsov; A. Islyaykin

doi:10.1117/12.853343

26 February 2010 Plasma parameters and active particles kinetics in HBr dc glow discharges

A. Smirnov, A. Efremov, V. Svettsov, A. Islyaykin

Proceedings Volume 7521, International Conference on Micro- and Nano-Electronics 2009; 752108 (2010) https://doi.org/10.1117/12.853343
Event: International Conference on Micro- and Nano-Electronics 2009, 2009, Zvenigorod, Russian Federation

Abstract

The study of the direct current (dc) glow discharge plasma parameters and active species kinetics in HBr (p=30-250 Pa, i_d=10-30 mA) was carried out using the 0-dimensional self-consistent steady-state model. The model included the Boltzmann kinetic equation, the balance equations for both neutral and charge particles, plasma conductivity equation and the quasi-neutrality conditions for volume densities of charged particles as well as for their fluxes to the reactor walls. The final set of cross-sections of electron impact processes for HBr molecules was optimized based on the recent literature data. The data on the steady-state electron energy distribution function, electron gas characteristics (mean energy, drift rate and transport coefficients) and volume-averaged densities of plasma active species were obtained as functions of gas pressure and discharge current.

Citation Download Citation

A. Smirnov, A. Efremov, V. Svettsov, and A. Islyaykin "Plasma parameters and active particles kinetics in HBr dc glow discharges", Proc. SPIE 7521, International Conference on Micro- and Nano-Electronics 2009, 752108 (26 February 2010); https://doi.org/10.1117/12.853343

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