Paper
1 March 2010 EO polymer modulators reliability study
Dan Jin, Hui Chen, Anna Barklund, Jonathan Mallari, Guomin Yu, Eric Miller, Raluca Dinu
Author Affiliations +
Abstract
The reliability of high speed polymer electro-optic (EO) modulators is the most critical milestone for the use of these materials in commercial applications. We present recent thermal stability data at material and device level that proves the stability at 85 °C for 25 years of GigOptix' polymer modulators. Fundamentally, the reliability of the device materials lays the foundation for stable final devices, thus the EO materials properties was monitored from batch to batch after synthesis and during wafer fabrication. Key parameters at chip level were analyzed to show the performance distribution on a 6" wafer. Thermal study performed at chip level fitted using Jonscher model was used to determine the isothermal aging stability of EO coefficient for 25 years and the EO materials' activation energy. M3 EO material shows <10 % change in EO coefficient while operating at 85 °C for 25 years.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dan Jin, Hui Chen, Anna Barklund, Jonathan Mallari, Guomin Yu, Eric Miller, and Raluca Dinu "EO polymer modulators reliability study", Proc. SPIE 7599, Organic Photonic Materials and Devices XII, 75990H (1 March 2010); https://doi.org/10.1117/12.837418
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Cited by 30 scholarly publications.
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KEYWORDS
Polymers

Semiconducting wafers

Modulators

Electrodes

Reliability

Cladding

Electro optic polymers

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