Fabrication and characterization of As2S3/Y3Fe5O12 and Y3Fe5O12/SOI strip-loaded waveguides for integrated optical isolator applications

Lei Bi; Juejun Hu; Lionel Kimerling; C. A. Ross

doi:10.1117/12.841832

11 February 2010 Fabrication and characterization of As₂S₃/Y₃Fe₅O₁₂ and Y₃Fe₅O₁₂/SOI strip-loaded waveguides for integrated optical isolator applications

Lei Bi, Juejun Hu, Lionel Kimerling, C. A. Ross

Author Affiliations +

Proceedings Volume 7604, Integrated Optics: Devices, Materials, and Technologies XIV; 760406 (2010) https://doi.org/10.1117/12.841832
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

We report two novel strategies to integrate magneto-optical oxides on oxidized silicon and SOI platforms based on strip-loaded waveguide structures. By using conventional waveguide fabrication and thin film deposition techniques, strip-loaded waveguides for magneto-optical non-reciprocal phase shift (NRPS) applications can be integrated on a silicon platform. As a demonstration, two structures, i.e. As₂S₃/Y₃Fe₅O₁₂ (YIG) and YIG/SOI waveguides are fabricated. Using pulsed-laser deposition followed by rapid thermal annealing, yttrium iron oxide films in which more than 95 vol.% had crystallized into the YIG phase were achieved on both substrates. The optical loss of the As₂S₃/Y₃Fe₅O₁₂ waveguide was characterized by a cut-back method to be ~10 dB/cm at 1550 nm, while the optical loss of a 450nm wide YIG/SOI waveguide was determined to be 41 dB/cm at 1550 nm by measuring the quality factor Q of a pulley-type ring resonator consisting of such waveguides. The propagation loss of polycrystalline YIG on a SiO₂/Si substrate was around 50 dB/cm at 1550 nm wavelength. The NRPS and figure of merit of both waveguides were simulated. It is suggested that a Bi:YIG or Ce:YIG layer may be integrated in these waveguide structures to achieve a higher NRPS and figure of merit for optical isolator applications. These waveguide fabrication techniques offer a compact, low cost and etch-free route for integrating magneto-optical materials on a silicon platform, which may be useful for making future integrated optical isolators and other magneto-optical components.

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Lei Bi, Juejun Hu, Lionel Kimerling, and C. A. Ross "Fabrication and characterization of As₂S₃/Y₃Fe₅O₁₂ and Y₃Fe₅O₁₂/SOI strip-loaded waveguides for integrated optical isolator applications", Proc. SPIE 7604, Integrated Optics: Devices, Materials, and Technologies XIV, 760406 (11 February 2010); https://doi.org/10.1117/12.841832

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