Product and tool control using integrated auto macro defect inspection in the photolithography cluster

Ted L. Taylor; Paul Shirley; David Dixon; Shoichiro Yanagi; Eri Makimura

doi:10.1117/12.846571

15 April 2010 Product and tool control using integrated auto macro defect inspection in the photolithography cluster

Ted L. Taylor, Paul Shirley, David Dixon, Shoichiro Yanagi, Eri Makimura

Proceedings Volume 7638, Metrology, Inspection, and Process Control for Microlithography XXIV; 763821 (2010) https://doi.org/10.1117/12.846571
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Defectivity control continues to challenge advanced semiconductor manufacturing, especially immersion lithography processes. Immersion exposure tools are sensitive to incoming wafer defects, including top coat voids, surface defects, and other random or systematic anomalies. A single defective wafer could contaminate the exposure tool's immersion hood resulting in lengthy and costly repairs. To mitigate this problem, TEL developed an integrated and real-time macro inspection solution to identify defective wafers which could potentially damage immersion exposure tools. The Wafer Intelligent Scanner (WIS) module integrates within the CLEAN TRACK^TM LITHIUS Pro^TM platform without impacting footprint or throughput. By utilizing user defined inspection criteria, wafers can be inspected prior to and after exposure for macro defects. Wafers failing to meet inspection criteria prior to exposure are automatically re-routed to bypass the exposure tool and subsequent process modules.

Citation Download Citation

Ted L. Taylor, Paul Shirley, David Dixon, Shoichiro Yanagi, and Eri Makimura "Product and tool control using integrated auto macro defect inspection in the photolithography cluster", Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 763821 (15 April 2010); https://doi.org/10.1117/12.846571

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available