Step height evaluation in the vibrating condition based on microscopic interferometry

Yan Bian; Tong Guo

doi:10.1117/12.863729

11 October 2010 Step height evaluation in the vibrating condition based on microscopic interferometry

Yan Bian, Tong Guo

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76562H (2010) https://doi.org/10.1117/12.863729
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Microscopic interferometry can be applied in the step height evaluation with sub-nanometer vertical resolution. This paper describes the effect of outside vibration on the evaluation process through many experiments. A micro actuator with high accuracy is used as the simulation of outside vibration. Experiments are done on the system with different vibration amplitudes, vibration frequencies and phase extracting algorithms. The experimental results show that different phase extracting algorithms have different responses to the outside vibration; low frequency has a strong effect on the measurement values when the vibration amplitude is below a threshold value; however, the effect on the step height evaluation is small by averaging many profiles.

Citation Download Citation

Yan Bian and Tong Guo "Step height evaluation in the vibrating condition based on microscopic interferometry", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76562H (11 October 2010); https://doi.org/10.1117/12.863729

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available