Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applications

Xudi Wang; Jian Jin; Qisheng Tang; Wenrui Tian; Xiaojun Li; Shaojun Fu; Yanlin Liao

doi:10.1117/12.866228

22 October 2010 Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applications

Xudi Wang, Jian Jin, Qisheng Tang, Wenrui Tian, Xiaojun Li, Shaojun Fu, Yanlin Liao

Proceedings Volume 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 765710 (2010) https://doi.org/10.1117/12.866228
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

In this paper, we present a novel method for the fabrication of high density pattern in PET foils employing nanoimprint lithorgraphy. The temperature and pressure dependence on the imprinted pattern were investigated. Well resolved PET nanopatterns (sub-100nm resolution) were transferred successfully. It is observed that the grating with different trench depths will demonstrates corresponding changes of diffraction intensity distribution. The grating imprinted in PET foils could broader applications in the manufacture of nanophotonic structures owing to its excellent flexibility and transparency. Based on the optimized imprint process, a novel method for the fabrication of phase gratings and nanochannels is presented. This developed process can find broader applications in the manufacture of nanofluidic channels and other nanophotonic structures.

Citation Download Citation

Xudi Wang, Jian Jin, Qisheng Tang, Wenrui Tian, Xiaojun Li, Shaojun Fu, and Yanlin Liao "Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applications", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 765710 (22 October 2010); https://doi.org/10.1117/12.866228

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available