Characteristics of sensors based on MEMS grating with interdigitated comb structures

Naike Wei; Weimin Wang; Jun Yao; Kefan Chen; Jianhua Zhu; Fuhua Gao

doi:10.1117/12.866339

22 October 2010 Characteristics of sensors based on MEMS grating with interdigitated comb structures

Naike Wei, Weimin Wang, Jun Yao, Kefan Chen, Jianhua Zhu, Fuhua Gao

Proceedings Volume 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 76571O (2010) https://doi.org/10.1117/12.866339
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Gratings as important spectral components have been employed in various optics applications, such as spectral analysis, filtering, dispersion compensation, sensing and so on. However, the physical structure of gratings produced by conventional technologies can not be alterable, this limits their applications under some specific requirements. Fortunately, MEMS technology breaks through that restriction, an interdigitated comb structure has been demonstrated in this paper. The comb structure has two sets of comb gratings; one is stationary and the other is movable in the horizontal plane. By driving the movable comb gratings, the intensity of diffraction will be adjustable. Under the condition of Fraunhofer approximation, the broadening extent of zero-order diffraction is monotonically increasing with the longitudinal displacement, and the relation between the intensity of first-order diffraction and the lateral displacement is a cosine squared function. A displacement sensor based on movable comb structures is presented and detailed analysis on sensitivity factors is given.

Citation Download Citation

Naike Wei, Weimin Wang, Jun Yao, Kefan Chen, Jianhua Zhu, and Fuhua Gao "Characteristics of sensors based on MEMS grating with interdigitated comb structures", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 76571O (22 October 2010); https://doi.org/10.1117/12.866339

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KEYWORDS

Diffraction gratings

Microelectromechanical systems

Diffraction

Modulation

Sensors

Light sources

Far-field diffraction

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