On-chip micro-power: three-dimensional structures for micro-batteries and micro-supercapacitors

Majid Beidaghi; Chunlei Wang

doi:10.1117/12.852254

5 May 2010 On-chip micro-power: three-dimensional structures for micro-batteries and micro-supercapacitors

Majid Beidaghi, Chunlei Wang

Proceedings Volume 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II; 76791G (2010) https://doi.org/10.1117/12.852254
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

With the miniaturization of portable electronic devices, there is a demand for micro-power source which can be integrated on the semiconductor chips. Various micro-batteries have been developed in recent years to generate or store the energy that is needed by microsystems. Micro-supercapacitors are also developed recently to couple with microbatteries and energy harvesting microsystems and provide the peak power. Increasing the capacity per footprint area of micro-batteries and micro-supercapacitors is a great challenge. One promising route is the manufacturing of three dimensional (3D) structures for these micro-devices. In this paper, the recent advances in fabrication of 3D structure for micro-batteries and micro-supercapacitors are briefly reviewed.

Citation Download Citation

Majid Beidaghi and Chunlei Wang "On-chip micro-power: three-dimensional structures for micro-batteries and micro-supercapacitors", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76791G (5 May 2010); https://doi.org/10.1117/12.852254

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available