Deep-ultraviolet digital holographic microscopy for nano-inspection

Ahmad Faridian; David Hopp; Giancarlo Pedrini; Wolfgang Osten

doi:10.1117/12.854885

12 May 2010 Deep-ultraviolet digital holographic microscopy for nano-inspection

Ahmad Faridian, David Hopp, Giancarlo Pedrini, Wolfgang Osten

Proceedings Volume 7718, Optical Micro- and Nanometrology III; 771803 (2010) https://doi.org/10.1117/12.854885
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We present an off-axis digital holographic setup in the deep ultraviolet to improve the resolution of the optical microscopy down to the nanoscale. A deep (193 nm) UV laser has been used as a source and the setup arranged in a way to avoid aberrations due to the non-perfect optical elements. A cost-effective high aperture objective ( NA = 0.75 ) has been designed which is aberration-corrected for a long working distance. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. The system has the capability to investigate samples in both reflection and transmission mode.

Citation Download Citation

Ahmad Faridian, David Hopp, Giancarlo Pedrini, and Wolfgang Osten "Deep-ultraviolet digital holographic microscopy for nano-inspection", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 771803 (12 May 2010); https://doi.org/10.1117/12.854885

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