Development of SiGe arrays for visible-near IR applications

Ashok K. Sood; Robert A. Richwine; Yash R. Puri; Nicole DiLello; Judy L. Hoyt; Nibir Dhar; Raymond S. Balcerak; Thomas G. Bramhall

doi:10.1117/12.866362

30 August 2010 Development of SiGe arrays for visible-near IR applications

Ashok K. Sood, Robert A. Richwine, Yash R. Puri, Nicole DiLello, Judy L. Hoyt, Nibir Dhar, Raymond S. Balcerak, Thomas G. Bramhall

Author Affiliations +

Proceedings Volume 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon; 77800F (2010) https://doi.org/10.1117/12.866362
Event: SPIE NanoScience + Engineering, 2010, San Diego, California, United States

Abstract

SiGe based focal plane arrays offer a low cost alternative for developing visible- near-infrared focal plane arrays that will cover the spectral band from 0.4 to 1.6 microns. The attractive features of SiGe based foal plane arrays take advantage of silicon based technology that promises small feature size, low dark current and compatibility with the low power silicon CMOS circuits for signal processing. This paper will discuss performance characteristics for the SiGe based VIS-NIR Sensors for a variety of defense and commercial applications using small unit cell size and compare performance with InGaAs, InSb, and HgCdTe IRFPA's. We will present results on the approach and device design for reducing the dark current in SiGe detector arrays. We will discuss electrical and optical properties of SiGe arrays at room temperature and as a function of temperature. We will also discuss future integration path for SiGe devices with other Silicon-based technology for defense and Commercial Applications.

Citation Download Citation

Ashok K. Sood, Robert A. Richwine, Yash R. Puri, Nicole DiLello, Judy L. Hoyt, Nibir Dhar, Raymond S. Balcerak, and Thomas G. Bramhall "Development of SiGe arrays for visible-near IR applications", Proc. SPIE 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon, 77800F (30 August 2010); https://doi.org/10.1117/12.866362

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