Paper
17 November 2010 Phase calibration of spatial light modulators by heterodyne interferometry
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Abstract
In this paper, a method of measuring the phase modulation properties of spatial light modulator (SLM) by heterodyne interferometry is proposed. As a kind of key elements in the advanced optical information processing systems, spatial light modulators is widely used in many important fields, especially used as a dynamic phase modulating device. So, the phase calibration plays an important role in the SLM applications. Compared with the methods based on traditional interferometry, this method measures the phase response directly by taking advantage of the heterodyne mechanism, so it leads to higher accuracy. A heterodyne-interferometer based calibration system making use of acousto-optic frequencyshifters has been designed and realized. Theoretical analysis and experimental results demonstrate the validity of this method.
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Ruisong Wang, Dong Li, Mingxi Hu, and Jindong Tian "Phase calibration of spatial light modulators by heterodyne interferometry", Proc. SPIE 7848, Holography, Diffractive Optics, and Applications IV, 78481F (17 November 2010); https://doi.org/10.1117/12.869961
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Cited by 1 scholarly publication.
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KEYWORDS
Spatial light modulators

Heterodyning

Phase measurement

Interferometry

Phase shift keying

Calibration

Phase modulation

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