Single-shot white-light dispersive interferometric profilometer

Pei Zhu; Kaiwei Wang; Shuangshuang Zhao

doi:10.1117/12.869987

9 November 2010 Single-shot white-light dispersive interferometric profilometer

Pei Zhu, Kaiwei Wang, Shuangshuang Zhao

Proceedings Volume 7849, Optical Design and Testing IV; 78491A (2010) https://doi.org/10.1117/12.869987
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

Traditional interferometric profilemeter suffers from phase ambiguity problem and sensitivity to environmental disturbance, thus preventing their applications for on-line surface inspections. We propose a new method to obtain the object surface's two-dimensional profile in a single shot using a dispersive interferometer. An air-spaced Fabry-Perot etalon was applied in order to decompose the light from the broadband source into discrete monochromatic constituents with equal wavelength interval. A blazed grating is implemented to effectively separate the interferograms of difference wavelength. As a result, the interference patterns of different wavelengths distributed separately on the CCD camera. By analyzing these patterns one can get the configuration of the original surface. A one-dimensional profiling experiment is carried out to test a surface with steps and the mean error of the result is below 0.2μm.

Citation Download Citation

Pei Zhu, Kaiwei Wang, and Shuangshuang Zhao "Single-shot white-light dispersive interferometric profilometer", Proc. SPIE 7849, Optical Design and Testing IV, 78491A (9 November 2010); https://doi.org/10.1117/12.869987

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