Mg/B4C EUV multilayer by introducing Co as barrier layer

Haochuan Li; Sika Zhou; Qiushi Huang; Moyan Tan; Li Jiang; Jingtao Zhu; Xiaoqiang Wang; Fengli Wang; Zhong Zhang; Zhanshan Wang; Lingyan Chen

doi:10.1117/12.888272

18 February 2011 Mg/B₄C EUV multilayer by introducing Co as barrier layer

Haochuan Li, Sika Zhou, Qiushi Huang, Moyan Tan, Li Jiang, Jingtao Zhu, Xiaoqiang Wang, Fengli Wang, Zhong Zhang, Zhanshan Wang, Lingyan Chen

Author Affiliations +

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79951E (2011) https://doi.org/10.1117/12.888272
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

Mg/B₄C multilayer provides very high theoretical reflectivity in extreme ultraviolet range near 30.4nm wavelength, while the interface between Mg and B₄C layer is very poor. In this paper, Co was introduced into the interface between Mg and B₄C as a barrier layer. Mg/B₄C and Co/Mg/Co/B₄C multilayers were designed, fabricated, and measured for the wavelength of 30.4nm. The thickness of Co barrier layer was optimized. Grazing incidence x-ray reflectance measurements show that the structural quality of Co/Mg/Co/B₄C multilayer is improved significantly after Co barrier layer inserting, and the optimum thickness of the barrier layer is 1.5nm.

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Haochuan Li, Sika Zhou, Qiushi Huang, Moyan Tan, Li Jiang, Jingtao Zhu, Xiaoqiang Wang, Fengli Wang, Zhong Zhang, Zhanshan Wang, and Lingyan Chen "Mg/B₄C EUV multilayer by introducing Co as barrier layer", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79951E (18 February 2011); https://doi.org/10.1117/12.888272

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