Laser terahertz emission microscope

Masayoshi Tonouchi; Sunmi Kim; Iwao Kawayama; Hironaru Murakami

doi:10.1117/12.887937

25 May 2011 Laser terahertz emission microscope

Masayoshi Tonouchi, Sunmi Kim, Iwao Kawayama, Hironaru Murakami

Proceedings Volume 8023, Terahertz Physics, Devices, and Systems V: Advance Applications in Industry and Defense; 80230Q (2011) https://doi.org/10.1117/12.887937
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

Recent progress of laser terahertz (THz) emission microscope (LTEM) is reviewed.Femtosecond lasers can excite the THz waves in various electronic materials due to ultrafast current modulation. The current modulation is realized by acceleration or deceleration of photo-excited carriers, and thus LTEM visualizes dynamic photo-response of substances. The developed systems have a minimum spatial resolution better than 1.0 μm, which is defined by the laser beam diameter. We alos provide esamples of LTEM application to material science and semiconductor devise failure.

Citation Download Citation

Masayoshi Tonouchi, Sunmi Kim, Iwao Kawayama, and Hironaru Murakami "Laser terahertz emission microscope", Proc. SPIE 8023, Terahertz Physics, Devices, and Systems V: Advance Applications in Industry and Defense, 80230Q (25 May 2011); https://doi.org/10.1117/12.887937

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